Erismis, Mehmet AkifMehmet AkifErismisPereira Neves, HerculesHerculesPereira NevesPuers, BobBobPuersVan Hoof, ChrisChrisVan Hoof2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12130Scream process for very large area MEMS structuresProceedings paper