Phase identification of self-forming Cu-Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structures

Ablett, JamesJamesAblettWoicik, JosephJosephWoicikTokei, ZsoltZsoltTokeiList, ScottScottListDimasi, ElaineElaineDimasi2021-10-172021-10-1720090003-6951https://imec-publications.be/handle/20.500.12860/14860Phase identification of self-forming Cu-Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structuresJournal article