Scheerlinck, StijnStijnScheerlinckVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9557Replication of SOI photonic structures by nano-imprint lithographyProceedings paper