3D backside integration of FinFETs: Is there an impact on LF noise?

Simoen, EddyEddySimoenJourdain, AnneAnneJourdainClaeys, CorCorClaeysVeloso, AnabelaAnabelaVeloso2024-01-302023-09-102024-01-3020230038-1101WOS:001058355700001https://imec-publications.be/handle/20.500.12860/425133D backside integration of FinFETs: Is there an impact on LF noise?Journal article10.1016/j.sse.2023.108724WOS:001058355700001