Kolbe, M.M.KolbeBeckhoff, B.B.BeckhoffKrumrey, M.M.KrumreyReading, M.A.M.A.Readingvan den Berg, J.A.J.A.van den BergConard, ThierryThierryConardDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15620Nanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiationMeeting abstract