Challenges for APT in advanced semiconductor technology research

Melkonyan, DavitDavitMelkonyanFleischmann, ClaudiaClaudiaFleischmannBogdanowicz, JanuszJanuszBogdanowiczArnoldi, LaurentLaurentArnoldiKumar, ArulArulKumarVurpillot, FrancoisFrancoisVurpillotVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26991Challenges for APT in advanced semiconductor technology researchMeeting abstract