Micro-Raman spectroscopy evaluation of the local mechanical stress in shallow trench isolation CMOS structures: correlation with defect generation and diode leakage

De Wolf, IngridIngridDe WolfGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaesBolt, M.M.BoltBarla, K.K.BarlaReader, A.A.ReaderMcNally, P. J.P. J.McNally2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2512Micro-Raman spectroscopy evaluation of the local mechanical stress in shallow trench isolation CMOS structures: correlation with defect generation and diode leakageProceedings paper