Correlation between pattern density and linewidth variation in silicon photonics waveguides

Xing, YufeiYufeiXingDong, JiaxingJiaxingDongKhan, Muhammad UmarMuhammad UmarKhanBogaerts, WimWimBogaerts2021-10-292021-10-292020-031094-4087https://imec-publications.be/handle/20.500.12860/36368Correlation between pattern density and linewidth variation in silicon photonics waveguidesJournal articlehttps://doi.org/10.1364/OE.388149