Ren, HuanHuanRenGronheid, RoelRoelGronheidSah, KaushikKaushikSahBouckou, LoembaLoembaBouckouCheng, GuojieGuojieChengGao, XuXuGaoTang, WeiweiWeiweiTangChen, ZhijinZhijinChenZafar, KhurramKhurramZafarHiggins, CraigCraigHigginsZhang, CaoCaoZhangGroeger, PhilipPhilipGroegerBald, HolgerHolgerBaldRoy, SyamashreeSyamashreeRoyBlanco, VictorVictorBlanco2025-07-312025-07-312025978-1-5106-8634-20277-786XWOS:001517286200022https://imec-publications.be/handle/20.500.12860/45993Wafer Edge Defectivity and Its Correlation to Process ParametersProceedings paper10.1117/12.3051868978-1-5106-8635-9WOS:001517286200022