Green, W.M.J.W.M.J.GreenKuyken, BartBartKuykenLiu, X.X.LiuVan Camp, M.A.M.A.Van CampAssefa, S.S.AssefaGill, D.M.D.M.GillBarwicz, TymonTymonBarwiczShank, S.M.S.M.ShankVlasov, Y.A.Y.A.VlasovOsgood, R.M.R.M.OsgoodBaets, RoelRoelBaetsRoelkens, GuntherGuntherRoelkens2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22429Mid-infrared silicon photonicsProceedings paper