El Rifai, JoumanaJoumanaEl RifaiWitvrouw, AnnAnnWitvrouwAbdel Aziz, AhmedAhmedAbdel AzizPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofSedky, SherifSherifSedky2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18871Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210CProceedings paper