Veloso, AnabelaAnabelaVelosoMatagne, PhilippePhilippeMatagneJang, DoyoungDoyoungJangHuynh Bao, TrongTrongHuynh BaoVaisman Chasin, AdrianAdrianVaisman ChasinSimoen, EddyEddySimoenEneman, GeertGeertEnemanDe Keersgieter, AnAnDe KeersgieterMertens, HansHansMertensHoriguchi, NaotoNaotoHoriguchi2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36233Gate-All-Around nanowire & nanosheet FETs for advanced, ultra-scaled technologies (Keynote)Meeting abstracthttps://doi.org/10.1149/MA2020-01241369mtgabs