From 2D to 3D: FIB sample preparation for carbon nanotube interconnects

Ke, XiaoxingXiaoxingKeBals, SarahSarahBalsRomo Negreira, AinhoaAinhoaRomo NegreiraCott, DaireDaireCottHantschel, ThomasThomasHantschelBender, HugoHugoBenderVan Tendeloo, GustaafGustaafVan Tendeloo2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17358From 2D to 3D: FIB sample preparation for carbon nanotube interconnectsProceedings paper