Vertical ferroelectric HfO2 FET based on 3-D NAND architecture: towards dense low-power memory

Florent, KarineKarineFlorentPesic, MilanMilanPesicSubirats, AlexandreAlexandreSubiratsBanerjee, KaustuvKaustuvBanerjeeLavizzari, SimoneSimoneLavizzariArreghini, AntonioAntonioArreghiniDi Piazza, LucaLucaDi PiazzaPotoms, GoedeleGoedelePotomsSebaai, FaridFaridSebaaiMcMitchell, SeanSeanMcMitchellPopovici, Mihaela IoanaMihaela IoanaPopoviciGroeseneken, GuidoGuidoGroesenekenVan Houdt, JanJanVan Houdt2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30713Vertical ferroelectric HfO2 FET based on 3-D NAND architecture: towards dense low-power memoryProceedings paperhttps://ieeexplore.ieee.org/document/8614710