Buffer vertical leakage mechanism and reliability of 200-mm GaN-on-SOI

Li, XiangdongXiangdongLiZhao, MingMingZhaoBakeroot, BenoitBenoitBakerootGeens, KarenKarenGeensGuo, WeimingWeimingGuoLempinen, Vesa-PekkaVesa-PekkaLempinenSormunen, JaakkoJaakkoSormunenGroeseneken, GuidoGuidoGroesenekenDecoutere, StefaanStefaanDecoutere2021-10-272021-10-2720190018-9383https://imec-publications.be/handle/20.500.12860/33435Buffer vertical leakage mechanism and reliability of 200-mm GaN-on-SOIJournal articlehttps://ieeexplore.ieee.org/document/8532115