Radisic, DunjaDunjaRadisicShamiryan, DenisDenisShamiryanMannaert, GeertGeertMannaertBoullart, WernerWernerBoullartRosseel, ErikErikRosseelBogdanowicz, JanuszJanuszBogdanowiczGoossens, JozefienJozefienGoossensMarrant, KoenKoenMarrantBender, HugoHugoBenderSonnemans, RogerRogerSonnemansBerry, IvanIvanBerry2021-10-182021-10-1820100013-4651https://imec-publications.be/handle/20.500.12860/17867Metrology for implanted Si substrate loss studiesJournal article