Verhaverbeke, StevenStevenVerhaverbekeMeuris, MarcMarcMeurisSchmidt, HaraldHaraldSchmidtMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/492Modelling of the hydrogen passivation kinetics of Si in dilute HF solutionsProceedings paper