Investigation of advanced organic strippers for ULSI processing

Rotondaro, AntonioAntonioRotondaroGluck, RonaldRonaldGluckMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsClaeys, CorCorClaeysHonda, K.K.HondaDaraktchiev, I.I.Daraktchiev2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/323Investigation of advanced organic strippers for ULSI processingProceedings paper