Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3

Wang, LilyLilyWangDimitrijev, SimaSimaDimitrijevHan, JishengJishengHanIacopi, FrancescaFrancescaIacopiZou, JinJinZou2021-10-182021-10-1820090022-0248https://imec-publications.be/handle/20.500.12860/16521Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3Journal article