Jin, S.S.JinBender, HugoHugoBenderAlves Donaton, RicardoRicardoAlves DonatonMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3539Microstructural studies by transmission electron microscopy of the formation of ultrathin PtSi layers with novel silicidation processesJournal article