Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions

Duhayon, NatasjaNatasjaDuhayonClarysse, TrudoTrudoClarysseEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6292Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctionsJournal article