Cubaynes, FlorenceFlorenceCubaynesSchmitz, JurriaanJurriaanSchmitzvan der marel, C.C.van der marelSnijders, H.H.SnijdersVeloso, AnabelaAnabelaVelosoRothschild, AudeAudeRothschildOlsen, C.C.OlsenDate, LucienLucienDate2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7368Plasma nitridation optimization sub-15A gate dielectricsProceedings paper