High temperature on- and off-state stress of GaN-on- Si HEMTs with in-situ Si3N4 cap layer

Marcon, DenisDenisMarconMedjdoub, FaridFaridMedjdoubVisalli, DomenicaDomenicaVisalliVan Hove, MarleenMarleenVan HoveDerluyn, JoffJoffDerluynDas, JoJoDasDegroote, StefanStefanDegrooteLeys, MaartenMaartenLeysCheng, KaiKaiChengDecoutere, StefaanStefaanDecoutereMertens, RobertRobertMertensGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17572High temperature on- and off-state stress of GaN-on- Si HEMTs with in-situ Si3N4 cap layerProceedings paper