Bargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenNaka, N.N.NakaOkuno, YYOkunoEneman, GeertGeertEnemanHikavyy, AndriyAndriyHikavyyVerheyen, PeterPeterVerheyenLoo, RogerRogerLooClaeys, CorCorClaeysMachkaoutsan, VladimirVladimirMachkaoutsanTomasini, PierrePierreTomasiniThomas, S.G.S.G.ThomasLu, J.PJ.PLuWise, RickRickWise2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13342Stress analysis of Si1-xGex embedded source/drain junctionsJournal article