Delabie, AnneliesAnneliesDelabieSioncke, SonjaSonjaSionckeRip, JensJensRipVan Elshocht, SvenSvenVan ElshochtCaymax, MattyMattyCaymaxPourtois, GeoffreyGeoffreyPourtoisPierloot, KristineKristinePierloot2021-10-192021-10-1920111932-7447https://imec-publications.be/handle/20.500.12860/18823Mechanisms for the trimethylaluminum reaction in aluminum oxide atomic layer deposition on sulfur passivated germaniumJournal article