Rakhimova, T.V.T.V.RakhimovaRakhimov, A.T.A.T.RakhimovMankelevich, Y.A.Y.A.MankelevichLopaev, D.V.D.V.LopaevZiryanov, S.M.S.M.ZiryanovKovalev, A.S.A.S.KovalevVasil'eva, A.N.A.N.Vasil'evaProshina, O.V.O.V.ProshinaBraginsky, O.V.O.V.BraginskyKurchikov, K.K.KurchikovBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/229771-D model of OSG low-k films modification by EUV/VUV emissionMeeting abstract