Torii, K.K.ToriiShimamoto, YasuhiroYasuhiroShimamotoSaito, S.S.SaitoTonomura, O.O.TonomuraHiratani, M.M.HirataniManabe, YukikoYukikoManabeCaymax, MattyMattyCaymaxMaes, JanJanMaes2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6887The mechanism of mobility degradation in misfets with Al2O3 gate dielectricProceedings paper