La Manna, AntonioAntonioLa MannaGuo, WeiWeiGuoVan Huylenbroeck, StefaanStefaanVan HuylenbroeckSirignano, EmilioEmilioSirignanoCherman, VladimirVladimirChermanVan der Plas, GeertGeertVan der PlasDe Wachter, BartBartDe WachterPhommahaxay, AlainAlainPhommahaxayJourdain, AnneAnneJourdainBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22630Study of 3D process impact on advanced CMOS devicesProceedings paper