Gronheid, RoelRoelGronheidChan, BTBTChanPathangi Sriraman, HariHariPathangi SriramanVan Den Heuvel, DieterDieterVan Den HeuvelMKuppuswamy, Vijaya KumarVijaya KumarMKuppuswamyDoise, JanJanDoiseBekaert, JoostJoostBekaertRincon Delgadillo, PaulinaPaulinaRincon DelgadilloNealey, PaulPaulNealeyCao, YiYiCaoHer, YoungJunYoungJunHerSayan, SafakSafakSayanParnell, DoniDoniParnellRomo Negreira, AinhoaAinhoaRomo NegreiraSomervell, MarkMarkSomervell2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23885Readying directed self-assembly for patterning in semiconductor manufacturingMeeting abstract