Nuytten, ThomasThomasNuyttenBogdanowicz, JanuszJanuszBogdanowiczHantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeFavia, PaolaPaolaFaviaBender, HugoHugoBenderDe Wolf, IngridIngridDe WolfVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29094Nanoscale stress measurements through advanced Raman spectroscopyProceedings paper