Gupta, AnshulAnshulGuptaGrzeskowiak, JodiJodiGrzeskowiakJourdan, NicolasNicolasJourdanYu, Kai-HungKai-HungYuJoy, NicolasNicolasJoyKundu, ShreyaShreyaKunduTeugels, LieveLieveTeugelsBoemmels, JuergenJuergenBoemmelsAdelmann, ChristophChristophAdelmannHeylen, NancyNancyHeylenJamieson, GeraldineGeraldineJamiesonSmith, JeffreyJeffreySmithRaley, AngeliqueAngeliqueRaleydeVilliers, AntonAntondeVilliersBiesemans, SergeSergeBiesemansWilson, ChrisChrisWilsonLeusink, GertGertLeusinkTokei, ZsoltZsoltTokei2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33068Ruthenium recess for buried power rail integrationMeeting abstracthttps://iitc-conference.org/2019-iitc-mam-program/