Goethals, MiekeMiekeGoethalsNiroomand, ArdavanArdavanNiroomandBan, KeundoKeundoBanHosokawa, KoheiKoheiHosokawaVan Roey, FriedaFriedaVan RoeyPollentier, IvanIvanPollentierJehoul, ChristianeChristianeJehoulVan Den Heuvel, DieterDieterVan Den HeuvelRonse, KurtKurtRonse2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17157EUV resist material performance, progress and process improvements at imecProceedings paper