Raised source/drains with disposable spacers for sub 100nm CMOS technologies

De Meyer, KristinKristinDe MeyerKubicek, StefanStefanKubicekvan Meer, HansHansvan Meer2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5198Raised source/drains with disposable spacers for sub 100nm CMOS technologiesProceedings paper