Strategies for increasing the rate of defect annihilation in the directed self-assembly of high- $v block copolymers

Doise, JanJanDoiseKoh, Jai HyunJai HyunKohKim, Ji YeonJi YeonKimZhu, QingjunQingjunZhuKinoshita, NatsukoNatsukoKinoshitaSuh, Hyo SeonHyo SeonSuhRincon Delgadillo, PaulinaPaulinaRincon DelgadilloVandenberghe, GeertGeertVandenbergheWillson, C. GrantC. GrantWillsonEllison, Christopher J.Christopher J.Ellison2021-10-272021-10-2720191944-8244https://imec-publications.be/handle/20.500.12860/32910Strategies for increasing the rate of defect annihilation in the directed self-assembly of high- $v block copolymersJournal articlehttps://pubs.acs.org/doi/10.1021/acsami.9b17858