Characterization of extreme ultraviolet resists with interference lithography

Solak, Harun H.Harun H.SolakEkinci, YasinYasinEkinciGronheid, RoelRoelGronheidJouve, AmandineAmandineJouve2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11256Characterization of extreme ultraviolet resists with interference lithographyOral presentation