A wet chemical method for the determination of thickness of SiO2 layers below the nanometer level

De Smedt, FrankFrankDe SmedtStevens, G.G.StevensDe Gendt, StefanStefanDe GendtCornelissen, IngridIngridCornelissenArnauts, SophiaSophiaArnautsMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsVinckier, ChrisChrisVinckier2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3370A wet chemical method for the determination of thickness of SiO2 layers below the nanometer levelJournal article