External I/O interfaces in sub-5nm GAA NS Technology and STCO Scaling Options

Chen, Wen ChiehWen ChiehChenChen, Shih-HungShih-HungChenHellings, GeertGeertHellingsBury, ErikErikBurySimicic, MarkoMarkoSimicicWu, ZhichengZhichengWuVan der Plas, GeertGeertVan der PlasBeyne, EricEricBeyneGroeseneken, GuidoGuidoGroeseneken2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36566External I/O interfaces in sub-5nm GAA NS Technology and STCO Scaling OptionsProceedings paperhttps://ieeexplore.ieee.org/document/9508668