Czarnecki, PiotrPiotrCzarneckiRottenberg, XavierXavierRottenbergSoussan, PhilippePhilippeSoussanEkkels, PhillipPhillipEkkelsMuller, PhilippePhilippeMullerNolmans, PhilipPhilipNolmansDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmansPuers, BobBobPuersMarchand, LaurentLaurentMarchandDe Wolf, IngridIngridDe Wolf2021-10-172021-10-172008-01https://imec-publications.be/handle/20.500.12860/13580Influence of the substrate on the lifetime of capacitive RF MEMS switchesProceedings paper