Contact-edge roughness (CER) characterization and modeling: effect of dose on CER and crtitical dimension uniformity

Kuppuswamy, Vijaya-Kumar MurugesanVijaya-Kumar MurugesanKuppuswamyConstantoudis, VassiliosVassiliosConstantoudisGogolides, EvangelosEvangelosGogolidesGronheid, RoelRoelGronheidVaglio Pret, AlessandroAlessandroVaglio Pret2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19209Contact-edge roughness (CER) characterization and modeling: effect of dose on CER and crtitical dimension uniformityProceedings paper