Jonckheere, RikRikJonckheereVan Den Heuvel, DieterDieterVan Den HeuvelHendrickx, EricEricHendrickxRonse, KurtKurtRonseBret, TristanTristanBretHofmann, ThorstenThorstenHofmannMagana, JohnJohnMaganaAharonson, IsraelIsraelAharonsonMeshulach, DoronDoronMeshulach2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19138Evidence of printing blank-related defects on EUV masks missed by blank inspectionProceedings paper