Pantouvaki, MariannaMariannaPantouvakiZhao, LarryLarryZhaoHuffman, CraigCraigHuffmanVanstreels, KrisKrisVanstreelsVerdonck, PatrickPatrickVerdonckOno, YukiharuYukiharuOnoNakajima, MichioMichioNakajimaNakatani, KojiKojiNakataniBeyer, GeraldGeraldBeyerBaklanov, MikhaïlMikhaïlBaklanov2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19538Ultra low-k materials based on self-assembled organic polymersProceedings paper