Wafer bow of substrate transfer process for GaNLED on Si 8 inch

Pham, NgaNgaPhamRosmeulen, MaartenMaartenRosmeulenBryce, GeorgeGeorgeBryceSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanOsman, HarisHarisOsman2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21298Wafer bow of substrate transfer process for GaNLED on Si 8 inchProceedings paper