Compact integration of optical sources and detectors on SOI for optical interconnects fabricated in a 200 mm CMOS pilot line

Spuesens, ThijsThijsSpuesensMandorlo, FabienFabienMandorloRojo-Romeo, PedroPedroRojo-RomeoRegreny, P.P.RegrenyOlivier, NicolasNicolasOlivierFedeli, Jean-MarcJean-MarcFedeliVan Thourhout, DriesDriesVan Thourhout2021-10-202021-10-202012-060733-8724https://imec-publications.be/handle/20.500.12860/21539Compact integration of optical sources and detectors on SOI for optical interconnects fabricated in a 200 mm CMOS pilot lineJournal article