Engineering polymer core-silica shell size in the composite abrasives for CMP applications

Armini, SilviaSilviaArminiWhelan, CarolineCarolineWhelanMaex, KarenKarenMaex2021-10-172021-10-1720081099-0062https://imec-publications.be/handle/20.500.12860/13313Engineering polymer core-silica shell size in the composite abrasives for CMP applicationsJournal article