From planar to vertical capacitors : a first step towards ferroelectric V-FeFET integration

Florent, KarineKarineFlorentLavizzari, SimoneSimoneLavizzariDi Piazza, LucaLucaDi PiazzaPopovici, Mihaela IoanaMihaela IoanaPopoviciPotoms, GoedeleGoedelePotomsRaymaekers, TomTomRaymaekersGroeseneken, GuidoGuidoGroesenekenVan Houdt, JanJanVan Houdt2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28341From planar to vertical capacitors : a first step towards ferroelectric V-FeFET integrationProceedings paperhttp://ieeexplore.ieee.org/document/8066617/