Xu, KaidongKaidongXuPichler, StephanStephanPichlerWostyn, KurtKurtWostynCado, GwenaelleGwenaelleCadoSpringer, ClementClementSpringerGale, GlennGlennGaleDalmer, MichaelMichaelDalmerMertens, PaulPaulMertensBearda, TwanTwanBeardaGaulhofer, ErnstErnstGaulhoferPodlesnik, DDPodlesnik2021-10-182021-10-1820091662-9779https://imec-publications.be/handle/20.500.12860/16568Removal of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performanceJournal articlewww.scientific.net