Investigation on the corrosion of Cu metallization in the focused ion beam system due to a low I2 background

Bender, HugoHugoBenderJin, S.S.JinVervoort, IwanIwanVervoortLantasov, YuriYuriLantasov2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3228Investigation on the corrosion of Cu metallization in the focused ion beam system due to a low I2 backgroundProceedings paper