De Bokx, P. K.P. K.De BokxKidd, S. J.S. J.KiddWiener, G.G.WienerUrbach, H. P.H. P.UrbachDe Gendt, StefanStefanDe GendtMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2484Grazing-emission x-ray fluorescence spectrometry: a novel tool for surface contamination analysis and thin film metrologyProceedings paper