Guo, WeimingWeimingGuoDate, LucienLucienDatePena, VanessaVanessaPenaBao, X.X.BaoMerckling, ClementClementMercklingWaldron, NiamhNiamhWaldronCollaert, NadineNadineCollaertCaymax, MattyMattyCaymaxSanchez, E.E.SanchezVancoille, EricEricVancoilleBarla, KathyKathyBarlaThean, AaronAaronTheanEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-2220140003-6951https://imec-publications.be/handle/20.500.12860/23890Selective metal-organic chemical vapor deposition growth of high quality GaAs on Si(001)Journal articlehttp://scitation.aip.org/content/aip/journal/apl/105/6/10.1063/1.4892468