Cross-sectional imaging of directed self-assembly block copolymers

Okabe, KyeKyeOkabeYi, HeHeYiTung, Maryann CMaryann CTungTiberio, RichardRichardTiberioBekaert, JoostJoostBekaertGronheid, RoelRoelGronheidWong, H.S. PhilipH.S. PhilipWong2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25699Cross-sectional imaging of directed self-assembly block copolymersProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210772